Temperature effects on the electrical properties and structure of interfacial and bulk defects in Al/SiNx:H/Si devices
- Martínez, F.L.
- San Andrés, E.
- Del Prado, A.
- Mártil, I.
- Bravo, D.
- López, F.J.
ISSN: 0021-8979
Year of publication: 2001
Volume: 90
Issue: 3
Pages: 1573-1581
Type: Article