Limitations of high pressure sputtering for amorphous silicon deposition
- García-Hernansanz, R.
- García-Hemme, E.
- Montero, D.
- Olea, J.
- San Andrés, E.
- Prado, A.
- Ferrer, F.J.
- Mártil, I.
- González-Díaz, G.
Journal:
Materials Research Express
ISSN: 2053-1591
Year of publication: 2016
Volume: 3
Issue: 3
Type: Article