Interface quality of high-pressure reactive sputtered and atomic layer deposited titanium oxide thin films on silicon
- Dueñas, S.
- Castán, H.
- García, H.
- Barbolla, J.
- Andrés, E.S.
- Mártil, I.
- González-Díaz, G.
- Kukli, K.
- Aarik, J.
Actes de conférence:
2005 Spanish Conference on Electron Devices, Proceedings
ISBN: 9780780388109
Année de publication: 2005
Volumen: 2005
Pages: 49-52
Type: Communication dans un congrès