Thermally induced improvements on SiNx:H/lnP devices

  1. Redondo, E.
  2. Blanco, N.
  3. Mártil, I.
  4. González-Díaz, G.
  5. Pelaez, R.
  6. Dueñas, S.
  7. Castán, H.
Journal:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 0734-2101

Year of publication: 1999

Volume: 17

Issue: 4

Pages: 2178-2182

Type: Conference paper

DOI: 10.1116/1.582107 GOOGLE SCHOLAR
Data source: Scopus