Electrical characterization of ECR enhaced deposited silicon nitride bilayers for high quality Al/SiNx/InP MIS structure fabrication
- Dueñas, S.
- Peláez, R.
- Castán, E.
- Pinacho, R.
- Quintanilla, L.
- Barbolla, J.
- Mártil, I.
- Redondo, E.
- González-Díaz, G.
ISSN: 0957-4522
Year of publication: 1999
Volume: 10
Issue: 5
Pages: 373-377
Type: Article