Electrical characterization of ECR enhaced deposited silicon nitride bilayers for high quality Al/SiNx/InP MIS structure fabrication

  1. Dueñas, S.
  2. Peláez, R.
  3. Castán, E.
  4. Pinacho, R.
  5. Quintanilla, L.
  6. Barbolla, J.
  7. Mártil, I.
  8. Redondo, E.
  9. González-Díaz, G.
Aldizkaria:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Argitalpen urtea: 1999

Alea: 10

Zenbakia: 5

Orrialdeak: 373-377

Mota: Artikulua

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Datuen iturria: Scopus