Analysis of the oxygen contamination present in SiNx films deposited by electron cyclotron resonance

  1. García, S.
  2. Martin, J.M.
  3. Mártil, I.
  4. González-Diaz, G.
Journal:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 1520-8559,  0734-2101

Year of publication: 1995

Volume: 13

Issue: 3

Pages: 826-830

Type: Conference paper

DOI: 10.1116/1.579835 GOOGLE SCHOLAR
Data source: Scopus