Analysis of the oxygen contamination present in SiNx films deposited by electron cyclotron resonance
- García, S.
- Martin, J.M.
- Mártil, I.
- González-Diaz, G.
ISSN: 1520-8559, 0734-2101
Year of publication: 1995
Volume: 13
Issue: 3
Pages: 826-830
Type: Conference paper