Analysis of the oxygen contamination present in SiNx films deposited by electron cyclotron resonance
- García, S.
- Martin, J.M.
- Mártil, I.
- González-Diaz, G.
ISSN: 1520-8559, 0734-2101
Argitalpen urtea: 1995
Alea: 13
Zenbakia: 3
Orrialdeak: 826-830
Mota: Biltzar ekarpena