Oxygen-related defects in the top silicon layer of SIMOX; the effect of thermal treatments

  1. Rivera, A.
  2. De Nijs, J.M.M.
  3. Balk, P.
  4. Van Veen, A.
  5. Schut, H.
  6. Alkemade, P.F.A.
Journal:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Year of publication: 2000

Volume: 73

Issue: 1

Pages: 77-81

Type: Article

DOI: 10.1016/S0921-5107(99)00438-9 GOOGLE SCHOLAR
Data source: Scopus