Oxygen-related defects in the top silicon layer of SIMOX; the effect of thermal treatments
- Rivera, A.
- De Nijs, J.M.M.
- Balk, P.
- Van Veen, A.
- Schut, H.
- Alkemade, P.F.A.
ISSN: 0921-5107
Année de publication: 2000
Volumen: 73
Número: 1
Pages: 77-81
Type: Article