The effect of parameter choice on predicted depth resolution in sputter profiling

  1. Carter, G.
  2. Nobes, M.J.
  3. Katardjiev, I.V.
  4. Jiménez-Rodríguez, J.J.
  5. Abril, I.
  6. Gras-Martí, A.
Journal:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Year of publication: 1992

Volume: 67

Issue: 1-4

Pages: 486-490

Type: Article

DOI: 10.1016/0168-583X(92)95857-N GOOGLE SCHOLAR
Data source: Scopus