Comparison of calculated depth distributions of implanted ions for genuine and Ge-substituted InP targets

  1. Karpuzov, D.S.
  2. Jimenez-rodriguez, J.J.
  3. Armour, D.G.
Zeitschrift:
Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties

ISSN: 0141-8610

Datum der Publikation: 1986

Ausgabe: 53

Nummer: 3

Seiten: 696-L54

Art: Artikel

DOI: 10.1080/01418618608242831 GOOGLE SCHOLAR
Datenquelle: Scopus