Comparison of calculated depth distributions of implanted ions for genuine and Ge-substituted InP targets
- Karpuzov, D.S.
- Jimenez-rodriguez, J.J.
- Armour, D.G.
ISSN: 0141-8610
Année de publication: 1986
Volumen: 53
Número: 3
Pages: 696-L54
Type: Article