Comparison of calculated depth distributions of implanted ions for genuine and Ge-substituted InP targets

  1. Karpuzov, D.S.
  2. Jimenez-rodriguez, J.J.
  3. Armour, D.G.
Revue:
Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties

ISSN: 0141-8610

Année de publication: 1986

Volumen: 53

Número: 3

Pages: 696-L54

Type: Article

DOI: 10.1080/01418618608242831 GOOGLE SCHOLAR