Uncertainty contribution of tip-sample angle to AFM lateral measurements

  1. González-Jorge, H.
  2. Fernández-López, M.A.
  3. Valencia, J.L.
  4. Torres, S.
Revue:
Precision Engineering

ISSN: 0141-6359

Année de publication: 2011

Volumen: 35

Número: 1

Pages: 164-172

Type: Article

DOI: 10.1016/J.PRECISIONENG.2010.08.001 GOOGLE SCHOLAR