Surface relief subwavelength gratings by means of total internal reflection evanescent wave interference lithography

  1. Martinez-Anton, J.C.
Journal:
Journal of Optics A: Pure and Applied Optics

ISSN: 1464-4258 1741-3567

Year of publication: 2006

Volume: 8

Issue: 4

Type: Article

DOI: 10.1088/1464-4258/8/4/S22 GOOGLE SCHOLAR