Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering

  1. Iriarte, G.F.
  2. Reyes, D.F.
  3. González, D.
  4. Rodriguez, J.G.
  5. García, R.
  6. Calle, F.
Aldizkaria:
Applied Surface Science

ISSN: 0169-4332

Argitalpen urtea: 2011

Alea: 257

Zenbakia: 22

Orrialdeak: 9306-9313

Mota: Artikulua

DOI: 10.1016/J.APSUSC.2011.05.025 GOOGLE SCHOLAR
Datuen iturria: Scopus