Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering

  1. Iriarte, G.F.
  2. Reyes, D.F.
  3. González, D.
  4. Rodriguez, J.G.
  5. García, R.
  6. Calle, F.
Revue:
Applied Surface Science

ISSN: 0169-4332

Année de publication: 2011

Volumen: 257

Número: 22

Pages: 9306-9313

Type: Article

DOI: 10.1016/J.APSUSC.2011.05.025 GOOGLE SCHOLAR
La source de données: Scopus