Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering
- Iriarte, G.F.
- Reyes, D.F.
- González, D.
- Rodriguez, J.G.
- García, R.
- Calle, F.
ISSN: 0169-4332
Année de publication: 2011
Volumen: 257
Número: 22
Pages: 9306-9313
Type: Article