Compositional gradients at the nanoscale in substoichiometric thin films deposited by magnetron sputtering at oblique angles: A case study on SiOx thin films

1. Garcia-Valenzuela, A.
2. Alcaide, A.M.
3. Rico, V.
4. Ferrer, F.J.
5. Alcala, G.
6. Rojas, T.C.
7. Alvarez, R.
8. Gonzalez-Elipe, A.R.
9. Palmero, A.