Improved retention of phosphorus donors in germanium using a non-amorphizing fluorine co-implantation technique
- Monmeyran, C.
- Crowe, I.F.
- Gwilliam, R.M.
- Heidelberger, C.
- Napolitani, E.
- Pastor, D.
- Gandhi, H.H.
- Mazur, E.
- Michel, J.
- Agarwal, A.M.
- Kimerling, L.C.
ISSN: 1089-7550, 0021-8979
Argitalpen urtea: 2018
Alea: 123
Zenbakia: 16
Mota: Artikulua