Thermal stability of copper nitride thin films: The role of nitrogen migration
- Gonzalez-Arrabal, R.
- Gordillo, N.
- Martin-Gonzalez, M.S.
- Ruiz-Bustos, R.
- Agulló-López, F.
Revue:
Journal of Applied Physics
ISSN: 0021-8979
Année de publication: 2010
Volumen: 107
Número: 10
Type: Article