Comparative performance of static-mode ferrous MEMS gradiometers fabricated by a three-step DRIE process
- Campanella, H.
- Del Real, R.P.
- Duch, M.
- Guerrero, H.
- Esteve, J.
- Díaz-Michelena, M.
- Plaza, J.A.
ISSN: 0960-1317, 1361-6439
Datum der Publikation: 2010
Ausgabe: 20
Nummer: 7
Art: Artikel