Comparative performance of static-mode ferrous MEMS gradiometers fabricated by a three-step DRIE process

  1. Campanella, H.
  2. Del Real, R.P.
  3. Duch, M.
  4. Guerrero, H.
  5. Esteve, J.
  6. Díaz-Michelena, M.
  7. Plaza, J.A.
Aldizkaria:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317,  1361-6439

Argitalpen urtea: 2010

Alea: 20

Zenbakia: 7

Mota: Artikulua

DOI: 10.1088/0960-1317/20/7/075006 GOOGLE SCHOLAR
Datuen iturria: Scopus