Nitridation of Si by N[sub 2] Electron Cyclotron Resonance Plasma and Integration with ScO[sub x] Deposition
- Feijoo, P. C.
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Prado Millán, Álvaro del
1
- Toledano-Luque, M.
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San Andrés Serrano, Enrique
1
- Lucía Mulas, María Luisa 1
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1
Universidad Complutense de Madrid
info
ISSN: 0013-4651, 1945-7111
Año de publicación: 2010
Volumen: 157
Número: 4
Tipo: Artículo
Otras publicaciones en: Journal of The Electrochemical Society
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