Compositional characterization of silicon nitride thin films prepared by RF-sputtering

  1. Vila, M.
  2. Martín-Gago, J.A.
  3. Muñoz-Martín, A.
  4. Prieto, C.
  5. Miranzo, P.
  6. Osendi, M.I.
  7. García-López, J.
  8. Respaldiza, M.A.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 2002

Volume: 67

Issue: 3-4

Pages: 513-518

Type: Conference paper

DOI: 10.1016/S0042-207X(02)00221-X GOOGLE SCHOLAR
Data source: Scopus