Characterization of Si3N4 thin films prepared by r.f. magnetron sputtering
- Vila, M.
- Prieto, C.
- Miranzo, P.
- Osendi, M.I.
- Ramírez, R.
Revue:
Surface and Coatings Technology
ISSN: 0257-8972
Année de publication: 2002
Volumen: 151-152
Pages: 67-71
Type: Article