Characterization of Si implantation and annealing of InP by Raman spectroscopy
- Artus, L
- Cusco, R
- Martin, JM
- GonzalezDiaz, G
- Jacobson, DC (coord.)
- Luzzi, DE (coord.)
- Heinz, TF (coord.)
- Iwaki, M (coord.)
ISSN: 0272-9172
ISBN: 1-55899-255-3
Year of publication: 1995
Volume: 354
Pages: 213-217
Congress: Symposium on Beam-Solid Interactions for Materials Synthesis and Characterization, at the 1994 MRS Fall Meeting
Type: Conference paper