Characterization of Si implantation and annealing of InP by Raman spectroscopy
- Artus, L
- Cusco, R
- Martin, JM
- GonzalezDiaz, G
- Jacobson, DC (coord.)
- Luzzi, DE (coord.)
- Heinz, TF (coord.)
- Iwaki, M (coord.)
ISSN: 0272-9172
ISBN: 1-55899-255-3
Argitalpen urtea: 1995
Alea: 354
Orrialdeak: 213-217
Biltzarra: Symposium on Beam-Solid Interactions for Materials Synthesis and Characterization, at the 1994 MRS Fall Meeting
Mota: Biltzar ekarpena