Electron Energy Loss Spectroscopy of Semiconductor Nanostructures and Oxides

  1. Zhou, Wu
  2. Varela, Maria
  3. Idrobo, Juan-Carlos
  4. Pantelides, Sokrates T.
  5. Pennycook, Stephen J.
Book:
METROLOGY AND DIAGNOSTIC TECHNIQUES FOR NANOELECTRONICS
  1. Ma, Z (coord.)
  2. Seiler, DG (coord.)

ISBN: 978-981-4745-09-3 978-981-4745-08-6

Year of publication: 2017

Pages: 663-709

Type: Book chapter