High speed e-beam lithography for gold nanoarray fabrication and use in nanotechnology

  1. Trasobares, J.
  2. Vaurette, F.
  3. François, M.
  4. Romijn, H.
  5. Codron, J.-L.
  6. Vuillaume, D.
  7. Théron, D.
  8. Clément, N.
Journal:
Beilstein Journal of Nanotechnology

ISSN: 2190-4286

Year of publication: 2014

Volume: 5

Issue: 1

Pages: 1918-1925

Type: Article

DOI: 10.3762/BJNANO.5.202 GOOGLE SCHOLAR lock_openOpen access editor

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