High speed e-beam lithography for gold nanoarray fabrication and use in nanotechnology
- Trasobares, J.
- Vaurette, F.
- François, M.
- Romijn, H.
- Codron, J.-L.
- Vuillaume, D.
- Théron, D.
- Clément, N.
ISSN: 2190-4286
Year of publication: 2014
Volume: 5
Issue: 1
Pages: 1918-1925
Type: Article