Selective spatial atomic layer deposition of Cu, Cu2O, and CuO thin films in the open air: reality or fiction?

1. Sekkat, A.
2. Weber, M.
3. López-Sánchez, J.
4. Rabat, H.
5. Hong, D.
6. Rubio-Zuazo, J.
7. Bellet, D.
8. Chichignoud, G.
9. Kaminski-Cachopo, A.
10. Muñoz-Rojas, D.