Selective spatial atomic layer deposition of Cu, Cu2O, and CuO thin films in the open air: reality or fiction?
- Sekkat, A.
- Weber, M.
- López-Sánchez, J.
- Rabat, H.
- Hong, D.
- Rubio-Zuazo, J.
- Bellet, D.
- Chichignoud, G.
- Kaminski-Cachopo, A.
- Muñoz-Rojas, D.
Revue:
Materials Today Chemistry
ISSN: 2468-5194
Année de publication: 2023
Volumen: 29
Type: Article