Native Oxide Layer Role during Cryogenic-Temperature Ion Implantations in Germanium

1. Caudevilla, D.
2. Pérez-Zenteno, F.J.
3. Duarte-Cano, S.
4. Algaidy, S.
5. Benítez-Fernández, R.
6. Godoy-Pérez, G.
7. Olea, J.
8. San Andrés, E.
9. García-Hernansanz, R.
10. del Prado, Á.
11. Mártil, I.
12. Pastor, D.
13. García-Hemme, E.

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DOI: 10.1002/PSSA.202400124 GOOGLE SCHOLAR lock_openOpen access editor

Data source: Scopus