Publications by the researcher in collaboration with M. Pilar Villar Castro (2)

2011

  1. Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology

    IEEE International Ultrasonics Symposium, IUS

  2. Sputter optimization of AlN on diamond substrates for high frequency SAW resonators

    Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011