2011

1. Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology

   IEEE International Ultrasonics Symposium, IUS

2. Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering

   Applied Surface Science, Vol. 257, Núm. 22, pp. 9306-9313

3. Sputter optimization of AlN on diamond substrates for high frequency SAW resonators

   Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011