Publications by the researcher in collaboration with Fernando Calle Gómez (3)

2011

  1. Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology

    IEEE International Ultrasonics Symposium, IUS

  2. Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering

    Applied Surface Science, Vol. 257, Núm. 22, pp. 9306-9313

  3. Sputter optimization of AlN on diamond substrates for high frequency SAW resonators

    Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011