Publicaciones en las que colabora con Francisco Javier García López (2)

2003

  1. Influence of the target and working gas on the composition of silicon nitride thin films prepared by reactive RF-sputtering

    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 211, Núm. 2, pp. 199-205

2002

  1. Compositional characterization of silicon nitride thin films prepared by RF-sputtering

    Vacuum