Publications en collaboration avec des chercheurs de Universidad Carlos III de Madrid (6)

2003

  1. Mechanical properties of sputtered silicon nitride thin films

    Journal of Applied Physics, Vol. 94, Núm. 12, pp. 7868-7873

2002

  1. Characterization of Si3N4 thin films prepared by r.f. magnetron sputtering

    Surface and Coatings Technology, Vol. 151-152, pp. 67-71