DRIE based novel technique for AFM probes fabrication

  1. Villanueva, G.
  2. Plaza, J.A.
  3. Sánchez, A.
  4. Zinoviev, K.
  5. Pérez-Murano, F.
  6. Bausells, J.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2007

Volume: 84

Issue: 5-8

Pages: 1132-1135

Type: Article

DOI: 10.1016/J.MEE.2007.01.078 GOOGLE SCHOLAR
Data source: Scopus