DRIE based novel technique for AFM probes fabrication
- Villanueva, G.
- Plaza, J.A.
- Sánchez, A.
- Zinoviev, K.
- Pérez-Murano, F.
- Bausells, J.
ISSN: 0167-9317
Year of publication: 2007
Volume: 84
Issue: 5-8
Pages: 1132-1135
Type: Article
ISSN: 0167-9317
Year of publication: 2007
Volume: 84
Issue: 5-8
Pages: 1132-1135
Type: Article