Mechanical properties of amorphous anodic alumina and tantala films using nanoindentation

  1. Alcalá, G.
  2. Skeldon, P.
  3. Thompson, G.E.
  4. Mann, A.B.
  5. Habazaki, H.
  6. Shimizu, K.
Journal:
Nanotechnology

ISSN: 0957-4484

Year of publication: 2002

Volume: 13

Issue: 4

Pages: 451-455

Type: Article

DOI: 10.1088/0957-4484/13/4/302 GOOGLE SCHOLAR

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