Deposition of conformal copper and nickel films from supercritical carbon dioxide

  1. Blackburn, J.M.
  2. Long, D.P.
  3. Cabañas, A.
  4. Watkins, J.J.
Journal:
Science

ISSN: 0036-8075

Year of publication: 2001

Volume: 294

Issue: 5540

Pages: 141-145

Type: Article

DOI: 10.1126/SCIENCE.1064148 GOOGLE SCHOLAR