Deposition of conformal copper and nickel films from supercritical carbon dioxide
- Blackburn, J.M.
- Long, D.P.
- Cabañas, A.
- Watkins, J.J.
ISSN: 0036-8075
Year of publication: 2001
Volume: 294
Issue: 5540
Pages: 141-145
Type: Article
ISSN: 0036-8075
Year of publication: 2001
Volume: 294
Issue: 5540
Pages: 141-145
Type: Article