Improvement of SiNx:H/InP gate structures for the fabrication of metal-insulator-semiconductor field-effect transistors
- Redondo, E.
- Mártil, I.
- González Díaz, G.
- Fernández, P.
- Cimas, R.
ISSN: 0268-1242
Année de publication: 2002
Volumen: 17
Número: 7
Pages: 672-676
Type: Article