Dielectric properties of anodic films formed on sputtering-deposited tantalum in phosphoric acid solution

  1. Lu, Q.
  2. Mato, S.
  3. Skeldon, P.
  4. Thompson, G.E.
  5. Masheder, D.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2003

Volume: 429

Issue: 1-2

Pages: 238-242

Type: Article

DOI: 10.1016/S0040-6090(02)01292-0 GOOGLE SCHOLAR
Data source: Scopus