Study of thermal treated a-Si implanted with Er and O ions

  1. Plugaru, R.
  2. Méndez, B.
  3. Piqueras, J.
  4. Tate, T.J.
Journal:
Journal of Physics Condensed Matter

ISSN: 0953-8984

Year of publication: 2002

Volume: 14

Issue: 48

Pages: 13153-13159

Type: Article

DOI: 10.1088/0953-8984/14/48/363 GOOGLE SCHOLAR
Data source: Scopus