Failure mechanism of AlN nanocaps used to protect rare earth-implanted GaN during high temperature annealing

  1. Nogales, E.
  2. Martin, R.W.
  3. O'Donnell, K.P.
  4. Lorenz, K.
  5. Alves, E.
  6. Ruffenach, S.
  7. Briot, O.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 2006

Volume: 88

Issue: 3

Pages: 1-3

Type: Article

DOI: 10.1063/1.2162797 GOOGLE SCHOLAR
Data source: Scopus