Good quality Al/SiNx:H/InP metal-insulator-semiconductor devices obtained with electron cyclotron resonance plasma method
- Garcia, S.
- Mártil, I.
- Gonzalez Diaz, G.
- Castan, E.
- Dueñas, S.
- Fernandez, M.
ISSN: 0021-8979
Argitalpen urtea: 1998
Alea: 83
Zenbakia: 1
Orrialdeak: 600-603
Mota: Artikulua