The influence of SiNx:H film properties on the electrical characteristics of metal-insulator-semiconductor devices

  1. Garcia, S.
  2. Mártil, I.
  3. Gonzalez Diaz, G.
  4. Fernandez, M.
Aldizkaria:
Semiconductor Science and Technology

ISSN: 0268-1242

Argitalpen urtea: 1997

Alea: 12

Zenbakia: 12

Orrialdeak: 1650-1653

Mota: Artikulua

DOI: 10.1088/0268-1242/12/12/018 GOOGLE SCHOLAR
Datuen iturria: Scopus