The influence of SiNx:H film properties on the electrical characteristics of metal-insulator-semiconductor devices
- Garcia, S.
- Mártil, I.
- Gonzalez Diaz, G.
- Fernandez, M.
ISSN: 0268-1242
Année de publication: 1997
Volumen: 12
Número: 12
Pages: 1650-1653
Type: Article