Properties of a-SiNx.: H films deposited at room temperature by the electron cyclotron resonance plasma method

  1. Garcia, S.
  2. Martin, J.M.
  3. Fernandez, M.
  4. Martil, I.
  5. Gonzalez-Diaz, G.
Journal:
Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties

ISSN: 1364-2812

Year of publication: 1996

Volume: 73

Issue: 3

Pages: 487-502

Type: Article

DOI: 10.1080/13642819608239130 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus