Properties of a-SiNx.: H films deposited at room temperature by the electron cyclotron resonance plasma method

  1. Garcia, S.
  2. Martin, J.M.
  3. Fernandez, M.
  4. Martil, I.
  5. Gonzalez-Diaz, G.
Aldizkaria:
Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties

ISSN: 1364-2812

Argitalpen urtea: 1996

Alea: 73

Zenbakia: 3

Orrialdeak: 487-502

Mota: Artikulua

DOI: 10.1080/13642819608239130 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus