Role of oxygen on the dangling bond configuration of low oxygen content SiNx:H films deposited at room temperature
- Garcia, S.
- Bravo, D.
- Fernandez, M.
- Martil, I.
- López, F.J.
Journal:
Applied Physics Letters
ISSN: 0003-6951
Year of publication: 1995
Volume: 67
Pages: 3263
Type: Article