Role of oxygen on the dangling bond configuration of low oxygen content SiNx:H films deposited at room temperature

  1. Garcia, S.
  2. Bravo, D.
  3. Fernandez, M.
  4. Martil, I.
  5. López, F.J.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 1995

Volume: 67

Pages: 3263

Type: Article

DOI: 10.1063/1.114892 GOOGLE SCHOLAR
Data source: Scopus