Raman and rutherford backscattering characterization of Ti implanted Si above Mott limit

  1. Olea, J.
  2. Pastor, D.
  3. Mártil, I.
  4. González-Díaz, G.
  5. Ibáñez, J.
  6. Cuscó, R.
  7. Artús, L.
Actes de conférence:
Materials Research Society Symposium Proceedings

ISSN: 0272-9172

ISBN: 9781605111834

Année de publication: 2010

Volumen: 1210

Pages: 93-98

Type: Communication dans un congrès